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Chip checking microscope TG2U
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Trade name】:Chip checking microscope TG2U Tel】:0086-10-51669522
Manufacturer】:Torch Model】:TG2U

TG2U lithography is used in the LSI, sensor, surface wave component, magnetic bubble, microwave, CCD and so on.

Lithography TG2U Technical parameter:
1.Template size:
2. silicon size:Φ50-Φ75mm, real line width 3-4цm;
3. comparative displacement between template and silicon:
a.X、Y ≥±2.5mm;
b.θ(rotate)≥±5°; station (silicon) rotate Z axies: rough tuning 360°,fine tuning ±5;
5.Integrated moving range of working station:X、Y integrate Φ75mm;
6. the space between ball basical station and template:0-7mm;
7. exposure system:GCQ200W over high-pressure ball Hg, exposure wave length:300~436nm;
8.engergy is not less than 407nm of wave length;7mw/cm;
9. uneven is within Φ75mm :±5%:
10. lighting wave length:≈545nm;
11. exposure time:O.01 seconds-99.99 minutes;
12. the focusing range of binocular:13mm;
13. the zoom of binocular :
a. pair ocular:lOX,16X;
b. flat field objective:6X,9X,15X;
c. total zoom out:60X-240X;
14. vacuum touching pressure:≥O.7Kgf;
15. power supply:
b.rotated input voltage:190V-230V;
c.power consumption:≤300VA;
16.Dimension:1000X850X980mm(2 boxes)
(1) vacuum supply:≥450mm Hg;
(2) The device of air supply stability is below
Add: If the user had any special request, please contact with us.